|
Z512, Z522 Digital / Analog
Mass Flow Controller / Meter
SEC-Z512MGX SEC-Z522MGXN SEC-Z522MGX
SEC-Z512X SEC-Z522XN SEC-Z522X
SEF-Z512MGX SEF-Z522MGXN SEF-Z522MGX
SEF-Z512X SEF-Z522XN SEF-Z522X
Full-scale flow rate MR/MG number
(N2 conversion flow rate) #R01:10SCCM
#R1.5:17.5SCCM
#01:30SCCM
#1.5:55SCCM
#02:100SCCM
#2.5:175SCCM
#03:300SCCM
#3.5:550SCCM
#04:1SLM
#4.5:1.75SLM
#05:3SLM
#5.5:5.5SLM
#06:10SLM
Valve Type
Flow rate at fully closed control valve
Flow rate control range
Flow rate measuring range (SEF)
Operating temperature
Response
Linearity
Repeatability
50 to 300 kPa (d)
#5.5, #06: 100 to 300 kPa (d)
Operating differential pressure (SEF)
MAX. Operating pressure
Pressure resistance
Leak Integrity
Flow rate setting signal
Flow rate output signal
Wetted materials
1/4 inch VCR equivalent
Option: 1.125 inch IGS
Mounting orientation
*1 The gas type and full scale settings for the SEC(SEF)-Z512MGX, Z522MGX, and Z522MGXN can be changed
by the operator, using special software.
*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
associated with the full-scale MR and MG number values.
*3 IGS: Integrated Gas System
* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0°C and 101.3 kPa).
Mass flow controller model *1 SEC-Z512KX
Mass flow meter model *1 SEF-Z512KX
O: Normally open C: Normally closed
≤ 2% F.S.
2-100% of F.S.
1/2SCCM
MR/MG number
#6.5: 22SLM
#07: 30SLM
#08: 50SLM
0-100% of F.S.
Accuracy *2 ±1.0%F.S. ±1.0%S.P.(Flow rate>25%F.S.)
±0.25%F.S.(Flow rate≤25%F.S.)
5 to 50°C (recommended temperature range: 15 to 45°C)
≤ 1 second: Over full flow rate range
≤ ±0.5% F.S.
≤ ±0.2% F.S.
Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
≤ 300 kPa (d)
450 kPa (g)
1000 kPa (g)
≤ 5 x 10-12 Pa·m3/s (He)
0.1 to 5 V DC (2% to F.S.); Input impedance 1 MÙ or higher
0 to 5 V DC (0% to F.S.); Minimum load resistance 2 kÙ or higher
Digital interface
With address function: RS-485 (transmission speed 38,400 bps)
F-Net Protocol
316L Stainless Steel (polished surface)
Power supply
+15V±5% 150mA
-15V±5% 150mA
Signal response
Analog: D-Sub 9-pin (TOP)
Digital: 2 LAN jacks (TOP)
Standard Fitting *3
1/4 inch VCR equivalent
Option: 1.125 inch IGS, 1.5 inch IGS
1.5 inch IGS
Free
Z512/522 Web Ver.001
Subject to change without notice.
|